Quick alignment tips

Dichotomy mode
  1. Adjust SEM to 100x magnification, 30kV and medium current (spot size 3).
  2. Adjust SEM and optical focus
  3. Report current SEM magnification, set dwell time to 10µs and scale to 8.
  4. Adjust optical settings until the e-beam is visible in the optical image.
  5. Disable the auto brightness/contrast.
  6. Use “Dichotomy mode” to select smaller and smaller sub-areas that move the e-beam closer to the center of the optical image.
  7. Click on “move to center”.
  8. Select “Spot mode” to verify that the e-beam can be seen in the optical image.
 
Spot mode
  1. Set binning of camera to 1
  2. Adjust optical settings and modify the brightness/contrast until the e-beam is clearly visible.
  3. Double click on the center of the e-beam until it is in the center of the optical image.
  4. Increase SEM magnification to desired level and repeat alignment.
 
Fine alignment
  1. Ensure the SEM field of view is approximately the same as the optical field of view.
  2. Report the SEM magnification.
  3. Click on “Fine alignment...” to perform automatic scaling and sub-pixel alignment.